From materials science to biotechnology, the field of nanotechnology has branched out into various areas of research. Several of these applications are predicated on the capacity to fabricate or ...

Several lithographic techniques are used for patterning in the nanoscale region. Light coupling mask (LCM) nanolithography is a variation on the commonly used technique of photolithography. In LCM a ...

Extreme ultraviolet light (EUV light) does not naturally occur on Earth, but it can be produced. In nanolithography machines, EUV light is generated using an immensely hot tin plasma. Researchers at ...

Recently, a joint research team from Hangzhou Institute of Technology of Xidian University, Humboldt University and the Max Born Institute announced a breakthrough in fabricating high-precision ...

A team of 12 Georgetown University professors will be adding a new three-dimensional nanolithography instrument, a tool used to create small structures that are measured in nanometers, to the ...

Professor Bruce Smith has been a member of the engineering faculty at RIT since joining the Microelectronic Engineering program in 1988. He is currently also the Director of the Microsystems ...

The University of Colorado Boulder has acquired a state-of-the-art Raith 100 kV EBPG5150Plus system, with high-resolution patterning capability below 5 nm. The system is integrated with a powerful ...

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